초록(영문)
Conventional silicon based AFM (Atomic Force Microscope) probes require the MEMS (Micro Electro-mechanical System)
fabrication process, so they can be manufactured only in a controlled clean-room environment using costly materials and equipments.
This discourages educational institutions such as universities and high schools from using AFMs. Therefore, the demands for cost-effective AFM probes requiring simpler fabrication protocols have steadily been increasing. Even though cost-effective polymeric AFM
probes have been developed, their production is still limited in laboratories and schools due to them requiring MEMS.
In this study, we have developed a novel method for non-MEMS based high-aspect ratio and conic AFM probe fabrication that can be
performed in laboratories or schools. Tungsten wires were etched for nano scale tip radius by means of electrochemical etching in NaOH
solution. To control the radius of the tungsten tip, the current was monitored and the etching rate was optimized using a customized
circuit. The etched tungsten tip was replicated using PDMS (Polydimethylsiloxane) as a negative tip mold. Then, photocuable hydrogel
was injected into the mold, which was then exposed to UV radiation for hydrogel tip attachment onto the hydrogel cantilever. We have
fabricated a tip of 50-nm radius and have imaged various silicon samples.